JPH0545179B2 - - Google Patents

Info

Publication number
JPH0545179B2
JPH0545179B2 JP61070152A JP7015286A JPH0545179B2 JP H0545179 B2 JPH0545179 B2 JP H0545179B2 JP 61070152 A JP61070152 A JP 61070152A JP 7015286 A JP7015286 A JP 7015286A JP H0545179 B2 JPH0545179 B2 JP H0545179B2
Authority
JP
Japan
Prior art keywords
semiconductor
wafer
ion sensor
isfet
semiconductor ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61070152A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62225940A (ja
Inventor
Jun Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61070152A priority Critical patent/JPS62225940A/ja
Publication of JPS62225940A publication Critical patent/JPS62225940A/ja
Publication of JPH0545179B2 publication Critical patent/JPH0545179B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP61070152A 1986-03-27 1986-03-27 半導体イオンセンサの検査方法 Granted JPS62225940A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61070152A JPS62225940A (ja) 1986-03-27 1986-03-27 半導体イオンセンサの検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61070152A JPS62225940A (ja) 1986-03-27 1986-03-27 半導体イオンセンサの検査方法

Publications (2)

Publication Number Publication Date
JPS62225940A JPS62225940A (ja) 1987-10-03
JPH0545179B2 true JPH0545179B2 (en]) 1993-07-08

Family

ID=13423316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61070152A Granted JPS62225940A (ja) 1986-03-27 1986-03-27 半導体イオンセンサの検査方法

Country Status (1)

Country Link
JP (1) JPS62225940A (en])

Also Published As

Publication number Publication date
JPS62225940A (ja) 1987-10-03

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